Abstract
This paper presents a novel low-loss (1.74dB) 3-pole Butterworth distributed filter operating in the Ka-band with a center frequency of 29GHz. The filter has a compact 6mm square footprint and is designed using 3-dimensional (3D) micromachined integrated coax. The integrated coax transmission lines are made of forty-one nickel layers and fabricated using a selective electrochemical metal deposition process (EFAB™). Full-wave simulations of the filter using Ansoft HFSS show very good agreement on insertion loss compared with measured results. Using the EFAB™, we have been able to produce low-loss, all-metal, completely shielded transmission lines with small bend radii and no inter-line coupling.
| Original language | English |
|---|---|
| Pages (from-to) | 801-804 |
| Number of pages | 4 |
| Journal | Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) |
| State | Published - 2004 |
| Externally published | Yes |
| Event | 17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS): Maastricht MEMS 2004 Technical Digest - Maastricht, Netherlands Duration: Jan 25 2004 → Jan 29 2004 |
ASJC Scopus Subject Areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Mechanical Engineering
- Electrical and Electronic Engineering