@inproceedings{a6eb4be641b443f7a85dd6c206a6ee83,
title = "A high sensitivity MEMS pressure sensor",
author = "Jesse Law and Ahsan Mian",
year = "2007",
doi = "10.1109/WMED.2007.368060",
language = "English",
isbn = "1424411130",
series = "2007 IEEE Workshop on Microelectronics and Electron Devices, WMED",
pages = "51--52",
booktitle = "2007 IEEE Workshop on Microelectronics andElectron Devices, WMED",
note = "5th Annual IEEE Workshop on Microelectronics and Electron Devices, WMED ; Conference date: 20-04-2007 Through 20-04-2007",
}