AlN/GaN/AlN resonant tunneling diodes grown by rf-plasma assisted molecular beam epitaxy on freestanding GaN

  • David F. Storm
  • , Tyler A. Growden
  • , Weidong Zhang
  • , Elliott R. Brown
  • , Neeraj Nepal
  • , D. Scott Katzer
  • , Matthew T. Hardy
  • , Paul R. Berger
  • , David J. Meyer

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Article number02B110
JournalJournal of Vacuum Science and Technology B: Nanotechnology and Microelectronics
Volume35
Issue number2
DOIs
StatePublished - Mar 1 2017
Externally publishedYes

ASJC Scopus Subject Areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Process Chemistry and Technology
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering
  • Materials Chemistry

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