Al1-x ScxN Thin Film Structures for Pyroelectric Sensing Applications

V. Vasilyev; J. Cetnar; B. Claflin; G. Grzybowski; K. Leedy; N. Limberopoulos; D. Look; S. Tetlak

doi:10.1557/adv.2016.510

Al_1-x Sc_xN Thin Film Structures for Pyroelectric Sensing Applications

V. Vasilyev, J. Cetnar, B. Claflin, G. Grzybowski, K. Leedy, N. Limberopoulos, D. Look, S. Tetlak

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	2711-2716
Number of pages	6
Journal	MRS Advances
Volume	1
Issue number	39
DOIs	https://doi.org/10.1557/adv.2016.510
State	Published - 2016
Externally published	Yes

ASJC Scopus Subject Areas

General Materials Science
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

Keywords

nitride
sensor
thin film

Access to Document

10.1557/adv.2016.510

Cite this

@article{e4d9c03aa9714ee986e59b956933bdd8,

title = "Al1-x ScxN Thin Film Structures for Pyroelectric Sensing Applications",

keywords = "nitride, sensor, thin film",

author = "V. Vasilyev and J. Cetnar and B. Claflin and G. Grzybowski and K. Leedy and N. Limberopoulos and D. Look and S. Tetlak",

note = "Publisher Copyright: Copyright {\textcopyright} Materials Research Society 2016.",

year = "2016",

doi = "10.1557/adv.2016.510",

language = "English",

volume = "1",

pages = "2711--2716",

journal = "MRS Advances",

issn = "2059-8521",

number = "39",

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TY - JOUR

T1 - Al1-x ScxN Thin Film Structures for Pyroelectric Sensing Applications

AU - Vasilyev, V.

AU - Cetnar, J.

AU - Claflin, B.

AU - Grzybowski, G.

AU - Leedy, K.

AU - Limberopoulos, N.

AU - Look, D.

AU - Tetlak, S.

PY - 2016

Y1 - 2016

KW - nitride

KW - sensor

KW - thin film

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U2 - 10.1557/adv.2016.510

DO - 10.1557/adv.2016.510

M3 - Article

AN - SCOPUS:85041354731

SN - 2059-8521

VL - 1

SP - 2711

EP - 2716

JO - MRS Advances

JF - MRS Advances

IS - 39