@article{e4d9c03aa9714ee986e59b956933bdd8,
title = "Al1-x ScxN Thin Film Structures for Pyroelectric Sensing Applications",
keywords = "nitride, sensor, thin film",
author = "V. Vasilyev and J. Cetnar and B. Claflin and G. Grzybowski and K. Leedy and N. Limberopoulos and D. Look and S. Tetlak",
note = "Publisher Copyright: Copyright {\textcopyright} Materials Research Society 2016.",
year = "2016",
doi = "10.1557/adv.2016.510",
language = "English",
volume = "1",
pages = "2711--2716",
journal = "MRS Advances",
issn = "2059-8521",
number = "39",
}