Anodized macroporous silicon anode for integration of lithium-ion batteries on chips

Xida Sun, Hong Huang, Kuan Lun Chu, Yan Zhuang

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)2369-2375
Number of pages7
JournalJournal of Electronic Materials
Volume41
Issue number9
DOIs
StatePublished - Sep 1 2012

ASJC Scopus Subject Areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry

Keywords

  • anode
  • lithium-ion battery
  • microbattery
  • Porous silicon
  • anode, lithium-ion battery, microbattery, Porous silicon

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