Artificial dielectric shields for integrated transmission lines

Yue Ma; Behzad Rejaei; Yan Zhuang

doi:10.1109/LMWC.2008.924907

Artificial dielectric shields for integrated transmission lines

Yue Ma, Behzad Rejaei, Yan Zhuang

Research output: Contribution to journal › Article › peer-review

Abstract

We present a novel shielding method for on-chip transmission lines built on conductive silicon substrates. The shield consists of an artificial dielectric with a very high in-plane dielectric constant, built from two patterned metal layers isolated by a very thin dielectric film. Inserted below an integrated coplanar transmission line, the artificial dielectric layer blocks the electric field of the line from entering the silicon substrate. Shielded coplanar waveguides fabricated on a conventional silicon wafer show a two- to three-fold loss reduction compared to unshielded lines at frequencies below 30 GHz.

Original language	English
Article number	4536891
Pages (from-to)	431-433
Number of pages	3
Journal	IEEE Microwave and Wireless Components Letters
Volume	18
Issue number	7
DOIs	https://doi.org/10.1109/LMWC.2008.924907
State	Published - Jul 2008
Externally published	Yes

ASJC Scopus Subject Areas

Condensed Matter Physics
Electrical and Electronic Engineering

Keywords

Artificial dielectric layer (ADL)
High k dielectric
Integrated transmission line
Radio frequency (RF)/microwave substrate loss
Shield

Disciplines

Electrical and Computer Engineering

Access to Document

10.1109/LMWC.2008.924907

Cite this

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title = "Artificial dielectric shields for integrated transmission lines",

abstract = "We present a novel shielding method for on-chip transmission lines built on conductive silicon substrates. The shield consists of an artificial dielectric with a very high in-plane dielectric constant, built from two patterned metal layers isolated by a very thin dielectric film. Inserted below an integrated coplanar transmission line, the artificial dielectric layer blocks the electric field of the line from entering the silicon substrate. Shielded coplanar waveguides fabricated on a conventional silicon wafer show a two- to three-fold loss reduction compared to unshielded lines at frequencies below 30 GHz.",

keywords = "Artificial dielectric layer (ADL), High k dielectric, Integrated transmission line, Radio frequency (RF)/microwave substrate loss, Shield",

author = "Yue Ma and Behzad Rejaei and Yan Zhuang",

year = "2008",

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doi = "10.1109/LMWC.2008.924907",

language = "English",

volume = "18",

pages = "431--433",

journal = "IEEE Microwave and Wireless Components Letters",

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T1 - Artificial dielectric shields for integrated transmission lines

AU - Ma, Yue

AU - Rejaei, Behzad

AU - Zhuang, Yan

PY - 2008/7

Y1 - 2008/7

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AB - We present a novel shielding method for on-chip transmission lines built on conductive silicon substrates. The shield consists of an artificial dielectric with a very high in-plane dielectric constant, built from two patterned metal layers isolated by a very thin dielectric film. Inserted below an integrated coplanar transmission line, the artificial dielectric layer blocks the electric field of the line from entering the silicon substrate. Shielded coplanar waveguides fabricated on a conventional silicon wafer show a two- to three-fold loss reduction compared to unshielded lines at frequencies below 30 GHz.

KW - Artificial dielectric layer (ADL)

KW - High k dielectric

KW - Integrated transmission line

KW - Radio frequency (RF)/microwave substrate loss

KW - Shield

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M3 - Article

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SP - 431

EP - 433

JO - IEEE Microwave and Wireless Components Letters

JF - IEEE Microwave and Wireless Components Letters

IS - 7

M1 - 4536891

ER -

Artificial dielectric shields for integrated transmission lines

Abstract

ASJC Scopus Subject Areas

Keywords

Disciplines

Access to Document

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Cite this