Calculation of shape anisotropy for micropatterned thin Fe-Ni films for on-chip RF applications

Marina Vourbel, Yan Zhuang, Behzad Rejaei, Joachim N. Burghartz, Ankur M. Crawford, Shan X. Wang

Research output: Contribution to journalArticlepeer-review

Abstract

We present a self-consistent calculation of the effective anisotropy of patterned, integrated ferromagnetic films. For comparison, experimental data were obtained from electroplated thin (0.5 μm) Ni-Fe films with different patterns. The effective anisotropy of patterned samples was increased by shape demagnetizing effects from just 10 Oe up to 100 Oe. The samples with suitable characteristics were subsequently used as cores for on-chip inductors and microstrips.
Original languageEnglish
Pages (from-to)2835-2837
Number of pages3
JournalIEEE Transactions on Magnetics
Volume40
Issue number4 II
DOIs
StatePublished - Jul 2004
Externally publishedYes

ASJC Scopus Subject Areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

Keywords

  • Demagnetization
  • Magnetic anisotropy
  • Magnetic permeability
  • Magnetic thin films

Disciplines

  • Electrical and Computer Engineering

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