@article{08d37f265f2246779f917d0a8679a02e,
title = "Characterization of the Temperature Dependence of the Pressure Coefficients of n- and p-Type Silicon Using Hydrostatic Testing",
keywords = "(111) silicon, Hydrostatic calibration, piezoresistive coefficients, pressure coefficients, stress sensors",
author = "Cho, {Chun Hyung} and Jaeger, {Richard C.} and Suhling, {Jeffrey C.} and Yanling Kang and Ahsan Mian",
year = "2008",
month = apr,
day = "1",
doi = "10.1109/JSEN.2008.917491",
language = "English",
volume = "8",
pages = "392--400",
journal = "IEEE Sensors Journal",
issn = "1530-437X",
number = "4",
}