Characterization of the Temperature Dependence of the Pressure Coefficients of n- and p-Type Silicon Using Hydrostatic Testing

Chun Hyung Cho, Richard C. Jaeger, Jeffrey C. Suhling, Yanling Kang, Ahsan Mian

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)392-400
Number of pages9
JournalIEEE Sensors Journal
Volume8
Issue number4
DOIs
StatePublished - Apr 1 2008

ASJC Scopus Subject Areas

  • Instrumentation
  • Electrical and Electronic Engineering

Keywords

  • (111) silicon
  • Hydrostatic calibration
  • piezoresistive coefficients
  • pressure coefficients
  • stress sensors

Disciplines

  • Engineering
  • Materials Science and Engineering
  • Mechanical Engineering

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