Characterization of the Temperature Dependence of the Pressure Coefficients of n- and p-Type Silicon Using Hydrostatic Testing

Chun Hyung Cho; Richard C. Jaeger; Jeffrey C. Suhling; Yanling Kang; Ahsan Mian

doi:10.1109/JSEN.2008.917491

Characterization of the Temperature Dependence of the Pressure Coefficients of n- and p-Type Silicon Using Hydrostatic Testing

Chun Hyung Cho
, Richard C. Jaeger
, Jeffrey C. Suhling
, Yanling Kang
, Ahsan Mian

Mechanical and Materials Engineering

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	392-400
Number of pages	9
Journal	IEEE Sensors Journal
Volume	8
Issue number	4
DOIs	https://doi.org/10.1109/JSEN.2008.917491
State	Published - Apr 1 2008

ASJC Scopus Subject Areas

Instrumentation
Electrical and Electronic Engineering

Keywords

(111) silicon
Hydrostatic calibration
piezoresistive coefficients
pressure coefficients
stress sensors

Disciplines

Engineering
Materials Science and Engineering
Mechanical Engineering

Access to Document

10.1109/JSEN.2008.917491

Cite this

@article{08d37f265f2246779f917d0a8679a02e,

title = "Characterization of the Temperature Dependence of the Pressure Coefficients of n- and p-Type Silicon Using Hydrostatic Testing",

keywords = "(111) silicon, Hydrostatic calibration, piezoresistive coefficients, pressure coefficients, stress sensors",

author = "Cho, \{Chun Hyung\} and Jaeger, \{Richard C.\} and Suhling, \{Jeffrey C.\} and Yanling Kang and Ahsan Mian",

year = "2008",

month = apr,

day = "1",

doi = "10.1109/JSEN.2008.917491",

language = "English",

volume = "8",

pages = "392--400",

journal = "IEEE Sensors Journal",

issn = "1530-437X",

number = "4",

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T1 - Characterization of the Temperature Dependence of the Pressure Coefficients of n- and p-Type Silicon Using Hydrostatic Testing

AU - Cho, Chun Hyung

AU - Jaeger, Richard C.

AU - Suhling, Jeffrey C.

AU - Kang, Yanling

AU - Mian, Ahsan

PY - 2008/4/1

Y1 - 2008/4/1

KW - (111) silicon

KW - Hydrostatic calibration

KW - piezoresistive coefficients

KW - pressure coefficients

KW - stress sensors

UR - https://www.scopus.com/pages/publications/85008062089

UR - https://www.scopus.com/pages/publications/85008062089#tab=citedBy

UR - https://corescholar.libraries.wright.edu/mme/341

U2 - 10.1109/JSEN.2008.917491

DO - 10.1109/JSEN.2008.917491

M3 - Article

AN - SCOPUS:85008062089

SN - 1530-437X

VL - 8

SP - 392

EP - 400

JO - IEEE Sensors Journal

JF - IEEE Sensors Journal

IS - 4

ER -

Characterization of the Temperature Dependence of the Pressure Coefficients of n- and p-Type Silicon Using Hydrostatic Testing

ASJC Scopus Subject Areas

Keywords

Disciplines

Access to Document

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Cite this