Computational investigation of van der Pauw structures for MEMS pressure sensors

Ahsan Mian; Jesse Law

doi:10.1016/j.commatsci.2010.06.008

Computational investigation of van der Pauw structures for MEMS pressure sensors

Wright State University

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	652-662
Number of pages	11
Journal	Computational Materials Science
Volume	49
Issue number	3
DOIs	https://doi.org/10.1016/j.commatsci.2010.06.008
State	Published - Sep 1 2010

ASJC Scopus Subject Areas

General Computer Science
General Chemistry
General Materials Science
Mechanics of Materials
General Physics and Astronomy
Computational Mathematics

Keywords

MEMS
Pressure sensor
Van der Pauw

Disciplines

Engineering
Materials Science and Engineering
Mechanical Engineering

Access to Document

10.1016/j.commatsci.2010.06.008

Cite this

@article{c0625382f4b44b9aae27efa327630615,

title = "Computational investigation of van der Pauw structures for MEMS pressure sensors",

keywords = "MEMS, Pressure sensor, Van der Pauw",

author = "Ahsan Mian and Jesse Law",

year = "2010",

month = sep,

day = "1",

doi = "10.1016/j.commatsci.2010.06.008",

language = "English",

volume = "49",

pages = "652--662",

journal = "Computational Materials Science",

issn = "0927-0256",

number = "3",

}

TY - JOUR

T1 - Computational investigation of van der Pauw structures for MEMS pressure sensors

AU - Mian, Ahsan

AU - Law, Jesse

PY - 2010/9/1

Y1 - 2010/9/1

KW - MEMS

KW - Pressure sensor

KW - Van der Pauw

UR - http://www.scopus.com/inward/record.url?scp=77955467507&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=77955467507&partnerID=8YFLogxK

UR - https://corescholar.libraries.wright.edu/mme/335

U2 - 10.1016/j.commatsci.2010.06.008

DO - 10.1016/j.commatsci.2010.06.008

M3 - Article

AN - SCOPUS:77955467507

SN - 0927-0256

VL - 49

SP - 652

EP - 662

JO - Computational Materials Science

JF - Computational Materials Science

IS - 3

ER -

Computational investigation of van der Pauw structures for MEMS pressure sensors

ASJC Scopus Subject Areas

Keywords

Disciplines

Access to Document

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Cite this