Copper electroplating approaches for 16nm technology

Jonathan Reid, Andrew McKerrow, Sesha Varadarajan, Greg Kozlowski

Research output: Contribution to specialist publicationArticle

Original languageEnglish
Pages14-16
Number of pages3
Volume53
No5
Specialist publicationSolid State Technology
StatePublished - May 2010
Externally publishedYes

ASJC Scopus Subject Areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry

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