Deep level defects and their instability in PLD-grown IGZO (In2Ga2Zn5O11) thin films studied by thermally stimulated current spectroscopy

Buguo Wang; David Look; Jason Anders; Kevin Leedy; Michael Schuette

doi:10.1088/1361-6641/abbd0c

Deep level defects and their instability in PLD-grown IGZO (In₂Ga₂Zn₅O₁₁) thin films studied by thermally stimulated current spectroscopy

Buguo Wang, David Look, Jason Anders, Kevin Leedy, Michael Schuette

Future of Semiconductors, a National Science Foundation Program

Research output: Contribution to journal › Article › peer-review

Original language	English
Article number	abbd0c
Journal	Semiconductor Science and Technology
Volume	35
Issue number	12
DOIs	https://doi.org/10.1088/1361-6641/abbd0c
State	Published - Oct 2020

ASJC Scopus Subject Areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Electrical and Electronic Engineering
Materials Chemistry

Keywords

Annealing effects
Electronic defects
Energy levels
InGaZnO
Pulse laser deposition
Thermally stimulated current spectroscopy
Thin-film transistor

Access to Document

10.1088/1361-6641/abbd0c

Cite this

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title = "Deep level defects and their instability in PLD-grown IGZO (In2Ga2Zn5O11) thin films studied by thermally stimulated current spectroscopy",

keywords = "Annealing effects, Electronic defects, Energy levels, InGaZnO, Pulse laser deposition, Thermally stimulated current spectroscopy, Thin-film transistor",

author = "Buguo Wang and David Look and Jason Anders and Kevin Leedy and Michael Schuette",

note = "Publisher Copyright: {\textcopyright} 2020 IOP Publishing Ltd Printed in the UK",

year = "2020",

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doi = "10.1088/1361-6641/abbd0c",

language = "English",

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T1 - Deep level defects and their instability in PLD-grown IGZO (In2Ga2Zn5O11) thin films studied by thermally stimulated current spectroscopy

AU - Wang, Buguo

AU - Look, David

AU - Anders, Jason

AU - Leedy, Kevin

AU - Schuette, Michael

PY - 2020/10

Y1 - 2020/10

KW - Annealing effects

KW - Electronic defects

KW - Energy levels

KW - InGaZnO

KW - Pulse laser deposition

KW - Thermally stimulated current spectroscopy

KW - Thin-film transistor

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DO - 10.1088/1361-6641/abbd0c

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JO - Semiconductor Science and Technology

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