Deep traps in high-purity semi-insulating 6H-SiC substrates: Thermally stimulated current spectroscopy

Z. Q. Fang; B. Claflin; D. C. Look; L. Polenta; J. Chen; T. Anderson; W. C. Mitchel

doi:10.4028/0-87849-425-1.509

Deep traps in high-purity semi-insulating 6H-SiC substrates: Thermally stimulated current spectroscopy

Z. Q. Fang, B. Claflin, D. C. Look, L. Polenta, J. Chen, T. Anderson, W. C. Mitchel

Future of Semiconductors, a National Science Foundation Program

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	Silicon Carbide and Related Materials 2005, - Proceedings of the International Conference on Silicon Carbide and Related Materials 2005
Publisher	Trans Tech Publications Ltd
Pages	509-512
Number of pages	4
Edition	PART 1
ISBN (Print)	9780878494255
DOIs	https://doi.org/10.4028/0-87849-425-1.509
State	Published - 2006
Event	International Conference on Silicon Carbide and Related Materials 2005, (ICSCRM 2005) - Pittsburgh, PA, United States Duration: Sep 18 2005 → Sep 23 2005

Publication series

Name	Materials Science Forum
Number	PART 1
Volume	527-529
ISSN (Print)	0255-5476
ISSN (Electronic)	1662-9752

Conference

Conference	International Conference on Silicon Carbide and Related Materials 2005, (ICSCRM 2005)
Country/Territory	United States
City	Pittsburgh, PA
Period	9/18/05 → 9/23/05

ASJC Scopus Subject Areas

General Materials Science
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

Keywords

Deep traps
High-purity semi-insulating SiC
Thermally stimulated current spectroscopy

Access to Document

10.4028/0-87849-425-1.509

Cite this

Fang, Z. Q., Claflin, B., Look, D. C., Polenta, L., Chen, J., Anderson, T., & Mitchel, W. C. (2006). Deep traps in high-purity semi-insulating 6H-SiC substrates: Thermally stimulated current spectroscopy. In Silicon Carbide and Related Materials 2005, - Proceedings of the International Conference on Silicon Carbide and Related Materials 2005 (PART 1 ed., pp. 509-512). (Materials Science Forum; Vol. 527-529, No. PART 1). Trans Tech Publications Ltd. https://doi.org/10.4028/0-87849-425-1.509

Deep traps in high-purity semi-insulating 6H-SiC substrates: Thermally stimulated current spectroscopy. / Fang, Z. Q.; Claflin, B.; Look, D. C. et al.
Silicon Carbide and Related Materials 2005, - Proceedings of the International Conference on Silicon Carbide and Related Materials 2005. PART 1. ed. Trans Tech Publications Ltd, 2006. p. 509-512 (Materials Science Forum; Vol. 527-529, No. PART 1).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Fang, ZQ, Claflin, B, Look, DC, Polenta, L, Chen, J, Anderson, T & Mitchel, WC 2006, Deep traps in high-purity semi-insulating 6H-SiC substrates: Thermally stimulated current spectroscopy. in Silicon Carbide and Related Materials 2005, - Proceedings of the International Conference on Silicon Carbide and Related Materials 2005. PART 1 edn, Materials Science Forum, no. PART 1, vol. 527-529, Trans Tech Publications Ltd, pp. 509-512, International Conference on Silicon Carbide and Related Materials 2005, (ICSCRM 2005), Pittsburgh, PA, United States, 9/18/05. https://doi.org/10.4028/0-87849-425-1.509

Fang ZQ, Claflin B, Look DC, Polenta L, Chen J, Anderson T et al. Deep traps in high-purity semi-insulating 6H-SiC substrates: Thermally stimulated current spectroscopy. In Silicon Carbide and Related Materials 2005, - Proceedings of the International Conference on Silicon Carbide and Related Materials 2005. PART 1 ed. Trans Tech Publications Ltd. 2006. p. 509-512. (Materials Science Forum; PART 1). doi: 10.4028/0-87849-425-1.509

Fang, Z. Q. ; Claflin, B. ; Look, D. C. et al. / Deep traps in high-purity semi-insulating 6H-SiC substrates : Thermally stimulated current spectroscopy. Silicon Carbide and Related Materials 2005, - Proceedings of the International Conference on Silicon Carbide and Related Materials 2005. PART 1. ed. Trans Tech Publications Ltd, 2006. pp. 509-512 (Materials Science Forum; PART 1).

@inproceedings{501ff22a59504c9795642a9e395954f1,

title = "Deep traps in high-purity semi-insulating 6H-SiC substrates: Thermally stimulated current spectroscopy",

keywords = "Deep traps, High-purity semi-insulating SiC, Thermally stimulated current spectroscopy",

author = "Fang, {Z. Q.} and B. Claflin and Look, {D. C.} and L. Polenta and J. Chen and T. Anderson and Mitchel, {W. C.}",

year = "2006",

doi = "10.4028/0-87849-425-1.509",

language = "English",

isbn = "9780878494255",

series = "Materials Science Forum",

publisher = "Trans Tech Publications Ltd",

number = "PART 1",

pages = "509--512",

booktitle = "Silicon Carbide and Related Materials 2005, - Proceedings of the International Conference on Silicon Carbide and Related Materials 2005",

edition = "PART 1",

note = "International Conference on Silicon Carbide and Related Materials 2005, (ICSCRM 2005) ; Conference date: 18-09-2005 Through 23-09-2005",

}

TY - GEN

T1 - Deep traps in high-purity semi-insulating 6H-SiC substrates

T2 - International Conference on Silicon Carbide and Related Materials 2005, (ICSCRM 2005)

AU - Fang, Z. Q.

AU - Claflin, B.

AU - Look, D. C.

AU - Polenta, L.

AU - Chen, J.

AU - Anderson, T.

AU - Mitchel, W. C.

PY - 2006

Y1 - 2006

KW - Deep traps

KW - High-purity semi-insulating SiC

KW - Thermally stimulated current spectroscopy

UR - http://www.scopus.com/inward/record.url?scp=34249051665&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=34249051665&partnerID=8YFLogxK

U2 - 10.4028/0-87849-425-1.509

DO - 10.4028/0-87849-425-1.509

M3 - Conference contribution

AN - SCOPUS:34249051665

SN - 9780878494255

T3 - Materials Science Forum

SP - 509

EP - 512

BT - Silicon Carbide and Related Materials 2005, - Proceedings of the International Conference on Silicon Carbide and Related Materials 2005

PB - Trans Tech Publications Ltd

Y2 - 18 September 2005 through 23 September 2005

ER -

Deep traps in high-purity semi-insulating 6H-SiC substrates: Thermally stimulated current spectroscopy

Publication series

Conference

ASJC Scopus Subject Areas

Keywords

Access to Document

Other files and links

Cite this