Depth-resolved cathodoluminescence and surface photovoltage spectroscopies of gallium vacancies in β-Ga2O3with neutron irradiation and forming gas anneals

Hantian Gao, Shreyas Muralidharan, Md Rezaul Karim, Lei R. Cao, Kevin D. Leedy, Hongping Zhao, Siddharth Rajan, David C. Look, Leonard J. Brillson

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Article number052205
JournalJournal of Vacuum Science and Technology B: Nanotechnology and Microelectronics
Volume39
Issue number5
DOIs
StatePublished - Sep 1 2021

ASJC Scopus Subject Areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Process Chemistry and Technology
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering
  • Materials Chemistry

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