Depth-resolved cathodoluminescence and surface photovoltage spectroscopies of gallium vacancies in β-Ga2O3with neutron irradiation and forming gas anneals

  • Hantian Gao
  • , Shreyas Muralidharan
  • , Md Rezaul Karim
  • , Lei R. Cao
  • , Kevin D. Leedy
  • , Hongping Zhao
  • , Siddharth Rajan
  • , David C. Look
  • , Leonard J. Brillson

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Article number052205
JournalJournal of Vacuum Science and Technology B: Nanotechnology and Microelectronics
Volume39
Issue number5
DOIs
StatePublished - Sep 1 2021

ASJC Scopus Subject Areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Process Chemistry and Technology
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering
  • Materials Chemistry

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