Depth-resolved cathodoluminescence and surface photovoltage spectroscopies of gallium vacancies in β-Ga2O3with neutron irradiation and forming gas anneals

Hantian Gao; Shreyas Muralidharan; Md Rezaul Karim; Lei R. Cao; Kevin D. Leedy; Hongping Zhao; Siddharth Rajan; David C. Look; Leonard J. Brillson

doi:10.1116/6.0001240

Depth-resolved cathodoluminescence and surface photovoltage spectroscopies of gallium vacancies in β-Ga₂O₃with neutron irradiation and forming gas anneals

Hantian Gao, Shreyas Muralidharan, Md Rezaul Karim, Lei R. Cao, Kevin D. Leedy, Hongping Zhao, Siddharth Rajan, David C. Look, Leonard J. Brillson

Future of Semiconductors, a National Science Foundation Program

Research output: Contribution to journal › Article › peer-review

Original language	English
Article number	052205
Journal	Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics
Volume	39
Issue number	5
DOIs	https://doi.org/10.1116/6.0001240
State	Published - Sep 1 2021

ASJC Scopus Subject Areas

Electronic, Optical and Magnetic Materials
Instrumentation
Process Chemistry and Technology
Surfaces, Coatings and Films
Electrical and Electronic Engineering
Materials Chemistry

Access to Document

10.1116/6.0001240

Cite this

Gao, H., Muralidharan, S., Karim, M. R., Cao, L. R., Leedy, K. D., Zhao, H., Rajan, S., Look, D. C., & Brillson, L. J. (2021). Depth-resolved cathodoluminescence and surface photovoltage spectroscopies of gallium vacancies in β-Ga₂O₃with neutron irradiation and forming gas anneals. Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics, 39(5), Article 052205. https://doi.org/10.1116/6.0001240

Depth-resolved cathodoluminescence and surface photovoltage spectroscopies of gallium vacancies in β-Ga₂O₃with neutron irradiation and forming gas anneals. / Gao, Hantian; Muralidharan, Shreyas; Karim, Md Rezaul et al.
In: Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics, Vol. 39, No. 5, 052205, 01.09.2021.

Research output: Contribution to journal › Article › peer-review

Gao, H, Muralidharan, S, Karim, MR, Cao, LR, Leedy, KD, Zhao, H, Rajan, S, Look, DC & Brillson, LJ 2021, 'Depth-resolved cathodoluminescence and surface photovoltage spectroscopies of gallium vacancies in β-Ga₂O₃with neutron irradiation and forming gas anneals', Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics, vol. 39, no. 5, 052205. https://doi.org/10.1116/6.0001240

@article{eaf3e75dd5964a51bc1e18d60b3c2d92,

title = "Depth-resolved cathodoluminescence and surface photovoltage spectroscopies of gallium vacancies in β-Ga2O3with neutron irradiation and forming gas anneals",

author = "Hantian Gao and Shreyas Muralidharan and Karim, \{Md Rezaul\} and Cao, \{Lei R.\} and Leedy, \{Kevin D.\} and Hongping Zhao and Siddharth Rajan and Look, \{David C.\} and Brillson, \{Leonard J.\}",

note = "Publisher Copyright: {\textcopyright} 2021 Author(s).",

year = "2021",

month = sep,

day = "1",

doi = "10.1116/6.0001240",

language = "English",

volume = "39",

journal = "Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics",

issn = "2166-2746",

number = "5",

}

TY - JOUR

T1 - Depth-resolved cathodoluminescence and surface photovoltage spectroscopies of gallium vacancies in β-Ga2O3with neutron irradiation and forming gas anneals

AU - Gao, Hantian

AU - Muralidharan, Shreyas

AU - Karim, Md Rezaul

AU - Cao, Lei R.

AU - Leedy, Kevin D.

AU - Zhao, Hongping

AU - Rajan, Siddharth

AU - Look, David C.

AU - Brillson, Leonard J.

PY - 2021/9/1

Y1 - 2021/9/1

UR - https://www.scopus.com/pages/publications/85113146260

UR - https://www.scopus.com/inward/citedby.url?scp=85113146260&partnerID=8YFLogxK

U2 - 10.1116/6.0001240

DO - 10.1116/6.0001240

M3 - Article

AN - SCOPUS:85113146260

SN - 2166-2746

VL - 39

JO - Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics

JF - Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics

IS - 5

M1 - 052205

ER -

Depth-resolved cathodoluminescence and surface photovoltage spectroscopies of gallium vacancies in β-Ga2O3with neutron irradiation and forming gas anneals

ASJC Scopus Subject Areas

Access to Document

Other files and links

Cite this

Depth-resolved cathodoluminescence and surface photovoltage spectroscopies of gallium vacancies in β-Ga₂O₃with neutron irradiation and forming gas anneals