Design and calibration of optimized (111) silicon stress sensing test chips

J. C. Suhling; R. C. Jaeger; S. T. Lin; A. K.M. Mian; R. A. Cordes; B. M. Wilamowski

Design and calibration of optimized (111) silicon stress sensing test chips

J. C. Suhling, R. C. Jaeger, S. T. Lin, A. K.M. Mian, R. A. Cordes, B. M. Wilamowski

Wright State University

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	1723-1729
Number of pages	7
Journal	American Society of Mechanical Engineers, EEP
Volume	19
Issue number	2
State	Published - Jan 1 1997

ASJC Scopus Subject Areas

Electrical and Electronic Engineering
Mechanical Engineering

Disciplines

Engineering
Materials Science and Engineering
Mechanical Engineering

Cite this

@article{657ab68585cb43a8b73613ca5eab7be1,

title = "Design and calibration of optimized (111) silicon stress sensing test chips",

author = "Suhling, {J. C.} and Jaeger, {R. C.} and Lin, {S. T.} and Mian, {A. K.M.} and Cordes, {R. A.} and Wilamowski, {B. M.}",

year = "1997",

month = jan,

day = "1",

language = "English",

volume = "19",

pages = "1723--1729",

journal = "American Society of Mechanical Engineers, EEP",

number = "2",

}

TY - JOUR

T1 - Design and calibration of optimized (111) silicon stress sensing test chips

AU - Suhling, J. C.

AU - Jaeger, R. C.

AU - Lin, S. T.

AU - Mian, A. K.M.

AU - Cordes, R. A.

AU - Wilamowski, B. M.

PY - 1997/1/1

Y1 - 1997/1/1

UR - http://www.scopus.com/inward/record.url?scp=3743101840&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=3743101840&partnerID=8YFLogxK

UR - https://corescholar.libraries.wright.edu/mme/390

M3 - Article

AN - SCOPUS:3743101840

VL - 19

SP - 1723

EP - 1729

JO - American Society of Mechanical Engineers, EEP

JF - American Society of Mechanical Engineers, EEP

IS - 2

ER -

Design and calibration of optimized (111) silicon stress sensing test chips

ASJC Scopus Subject Areas

Disciplines

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Cite this