Design and calibration of optimized (111) silicon stress sensing test chips

J. C. Suhling; R. C. Jaeger; S. T. Lin; A. K.M. Mian; R. A. Cordes; B. M. Wilamowski

Design and calibration of optimized (111) silicon stress sensing test chips

J. C. Suhling
, R. C. Jaeger
, S. T. Lin
, A. K.M. Mian
, R. A. Cordes
, B. M. Wilamowski

Mechanical and Materials Engineering

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	1723-1729
Number of pages	7
Journal	American Society of Mechanical Engineers, EEP
Volume	19
Issue number	2
State	Published - Jan 1 1997

ASJC Scopus Subject Areas

Electrical and Electronic Engineering
Mechanical Engineering

Disciplines

Engineering
Materials Science and Engineering
Mechanical Engineering

Cite this

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title = "Design and calibration of optimized (111) silicon stress sensing test chips",

author = "Suhling, \{J. C.\} and Jaeger, \{R. C.\} and Lin, \{S. T.\} and Mian, \{A. K.M.\} and Cordes, \{R. A.\} and Wilamowski, \{B. M.\}",

year = "1997",

month = jan,

day = "1",

language = "English",

volume = "19",

pages = "1723--1729",

journal = "American Society of Mechanical Engineers, EEP",

number = "2",

}

TY - JOUR

T1 - Design and calibration of optimized (111) silicon stress sensing test chips

AU - Suhling, J. C.

AU - Jaeger, R. C.

AU - Lin, S. T.

AU - Mian, A. K.M.

AU - Cordes, R. A.

AU - Wilamowski, B. M.

PY - 1997/1/1

Y1 - 1997/1/1

UR - https://www.scopus.com/pages/publications/3743101840

UR - https://www.scopus.com/pages/publications/3743101840#tab=citedBy

UR - https://corescholar.libraries.wright.edu/mme/390

M3 - Article

AN - SCOPUS:3743101840

VL - 19

SP - 1723

EP - 1729

JO - American Society of Mechanical Engineers, EEP

JF - American Society of Mechanical Engineers, EEP

IS - 2

ER -

Design and calibration of optimized (111) silicon stress sensing test chips

ASJC Scopus Subject Areas

Disciplines

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Cite this