Design, Fabrication, and Testing of the Van Der Pauw Piezoresistive Structure for Pressure Sensing

Robert Cassel, Ahsan Mian

Research output: Contribution to journalArticlepeer-review

Original languageAmerican English
JournalASME 2008 International Mechanical Engineering Congress and Exposition
Volume13- Nano-Manufacturing Technology; and Micro and Nano Systems, Parts A and B
DOIs
StatePublished - Oct 31 2008

Keywords

  • Pressure
  • Manufacturing
  • Design
  • Testing

Disciplines

  • Engineering
  • Materials Science and Engineering
  • Mechanical Engineering

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