Design, fabrication, and testing of VDP MEMS pressure sensors

Robert Cassel; Ahsan Mian; Todd Kaiser

doi:10.1007/s00542-011-1307-x

Design, fabrication, and testing of VDP MEMS pressure sensors

Robert Cassel, Ahsan Mian, Todd Kaiser

Wright State University

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	1301-1310
Number of pages	10
Journal	Microsystem Technologies
Volume	17
Issue number	8
DOIs	https://doi.org/10.1007/s00542-011-1307-x
State	Published - Aug 1 2011

ASJC Scopus Subject Areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Hardware and Architecture
Electrical and Electronic Engineering

Keywords

Angular Misalignment
Biaxial Stress State
Finite Element Analysis Model
Pressure Sensitivity
Wheatstone Bridge

Disciplines

Engineering
Materials Science and Engineering
Mechanical Engineering

Access to Document

10.1007/s00542-011-1307-x

Cite this

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title = "Design, fabrication, and testing of VDP MEMS pressure sensors",

keywords = "Angular Misalignment, Biaxial Stress State, Finite Element Analysis Model, Pressure Sensitivity, Wheatstone Bridge",

author = "Robert Cassel and Ahsan Mian and Todd Kaiser",

year = "2011",

month = aug,

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doi = "10.1007/s00542-011-1307-x",

language = "English",

volume = "17",

pages = "1301--1310",

journal = "Microsystem Technologies",

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T1 - Design, fabrication, and testing of VDP MEMS pressure sensors

AU - Cassel, Robert

AU - Mian, Ahsan

AU - Kaiser, Todd

PY - 2011/8/1

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KW - Angular Misalignment

KW - Biaxial Stress State

KW - Finite Element Analysis Model

KW - Pressure Sensitivity

KW - Wheatstone Bridge

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JO - Microsystem Technologies

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Design, fabrication, and testing of VDP MEMS pressure sensors

ASJC Scopus Subject Areas

Keywords

Disciplines

Access to Document

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