Design, fabrication, and testing of VDP MEMS pressure sensors

Robert Cassel; Ahsan Mian; Todd Kaiser

doi:10.1007/s00542-011-1307-x

Design, fabrication, and testing of VDP MEMS pressure sensors

Robert Cassel
, Ahsan Mian
, Todd Kaiser

Mechanical and Materials Engineering

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	1301-1310
Number of pages	10
Journal	Microsystem Technologies
Volume	17
Issue number	8
DOIs	https://doi.org/10.1007/s00542-011-1307-x
State	Published - Aug 2011

ASJC Scopus Subject Areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Hardware and Architecture
Electrical and Electronic Engineering

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10.1007/s00542-011-1307-x

Cite this

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title = "Design, fabrication, and testing of VDP MEMS pressure sensors",

author = "Robert Cassel and Ahsan Mian and Todd Kaiser",

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AU - Cassel, Robert

AU - Mian, Ahsan

AU - Kaiser, Todd

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Design, fabrication, and testing of VDP MEMS pressure sensors

ASJC Scopus Subject Areas

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