DIRECT MEASUREMENT OF THE SUBSURFACE HYDROGEN BARRIER LAYER IN PLASMA-TREATED SILICON RIBBON.

A. E. Jaworowski; L. S. Wielunski; T. W. Listerman

doi:10.1557/proc-46-561

DIRECT MEASUREMENT OF THE SUBSURFACE HYDROGEN BARRIER LAYER IN PLASMA-TREATED SILICON RIBBON.

A. E. Jaworowski, L. S. Wielunski, T. W. Listerman

Physics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	Materials Research Society Symposia Proceedings
Publisher	Materials Research Soc
Pages	561-565
Number of pages	5
ISBN (Print)	0931837111, 9780931837111
DOIs	https://doi.org/10.1557/proc-46-561
State	Published - 1985

Publication series

Name	Materials Research Society Symposia Proceedings
Volume	46
ISSN (Print)	0272-9172

ASJC Scopus Subject Areas

General Materials Science
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

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10.1557/proc-46-561

Cite this

DIRECT MEASUREMENT OF THE SUBSURFACE HYDROGEN BARRIER LAYER IN PLASMA-TREATED SILICON RIBBON. / Jaworowski, A. E.; Wielunski, L. S.; Listerman, T. W.
Materials Research Society Symposia Proceedings. Materials Research Soc, 1985. p. 561-565 (Materials Research Society Symposia Proceedings; Vol. 46).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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author = "Jaworowski, {A. E.} and Wielunski, {L. S.} and Listerman, {T. W.}",

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SN - 9780931837111

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BT - Materials Research Society Symposia Proceedings

PB - Materials Research Soc

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DIRECT MEASUREMENT OF THE SUBSURFACE HYDROGEN BARRIER LAYER IN PLASMA-TREATED SILICON RIBBON.

Publication series

ASJC Scopus Subject Areas

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