@article{6dadaa6b35c245009c9a960acea1523c,
title = "Effect of ammonia flow rate on impurity incorporation and material properties of Si-doped GaN epitaxial films grown by reactive molecular beam epitaxy",
author = "Wook Kim and Botchkarev, \{A. E.\} and H. Morko{\c c} and Fang, \{Z. Q.\} and Look, \{D. C.\} and Smith, \{David J.\}",
year = "1998",
month = dec,
day = "15",
doi = "10.1063/1.369044",
language = "English",
volume = "84",
pages = "6680--6685",
journal = "Journal of Applied Physics",
issn = "0021-8979",
number = "12",
}