Effect of ammonia flow rate on impurity incorporation and material properties of Si-doped GaN epitaxial films grown by reactive molecular beam epitaxy

  • Wook Kim
  • , A. E. Botchkarev
  • , H. Morkoç
  • , Z. Q. Fang
  • , D. C. Look
  • , David J. Smith

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)6680-6685
Number of pages6
JournalJournal of Applied Physics
Volume84
Issue number12
DOIs
StatePublished - Dec 15 1998

ASJC Scopus Subject Areas

  • General Physics and Astronomy

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