Effects of electron irradiation on deep centers in high-purity semi-insulating 6H-SiC

Z. Q. Fang, B. Claflin, D. C. Look, G. C. Farlow

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)307-311
Number of pages5
JournalJournal of Electronic Materials
Volume36
Issue number4
DOIs
StatePublished - Apr 2007

ASJC Scopus Subject Areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry

Keywords

  • Conductive and high-purity/semi- insulating (HPSI) 6H-SiC
  • Deep centers
  • Deep-level transient spectroscopy (DLTS)
  • Electron irradiation (EI)
  • Thermally stimulated current (TSC) spectroscopy

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