Effects of low-temperature-grown GaAs and AlGaAs on the current of a metal-insulator-semiconductor structure

C. L. Chen, L. J. Mahoney, K. B. Nichols, M. J. Manfra, E. R. Brown, P. M. Nitishin, K. M. Molvar, B. F. Gramstorff, R. A. Murphy

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)1745-1751
Number of pages7
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume14
Issue number3
DOIs
StatePublished - 1996
Externally publishedYes

ASJC Scopus Subject Areas

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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