Effects of low-temperature-grown GaAs and AlGaAs on the current of a metal-insulator-semiconductor structure

C. L. Chen; L. J. Mahoney; K. B. Nichols; M. J. Manfra; E. R. Brown; P. M. Nitishin; K. M. Molvar; B. F. Gramstorff; R. A. Murphy

doi:10.1116/1.588551

Effects of low-temperature-grown GaAs and AlGaAs on the current of a metal-insulator-semiconductor structure

C. L. Chen, L. J. Mahoney, K. B. Nichols, M. J. Manfra, E. R. Brown, P. M. Nitishin, K. M. Molvar, B. F. Gramstorff, R. A. Murphy

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	1745-1751
Number of pages	7
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	14
Issue number	3
DOIs	https://doi.org/10.1116/1.588551
State	Published - 1996
Externally published	Yes

ASJC Scopus Subject Areas

Condensed Matter Physics
Electrical and Electronic Engineering

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Chen, C. L., Mahoney, L. J., Nichols, K. B., Manfra, M. J., Brown, E. R., Nitishin, P. M., Molvar, K. M., Gramstorff, B. F., & Murphy, R. A. (1996). Effects of low-temperature-grown GaAs and AlGaAs on the current of a metal-insulator-semiconductor structure. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, 14(3), 1745-1751. https://doi.org/10.1116/1.588551

Chen, CL, Mahoney, LJ, Nichols, KB, Manfra, MJ, Brown, ER, Nitishin, PM, Molvar, KM, Gramstorff, BF & Murphy, RA 1996, 'Effects of low-temperature-grown GaAs and AlGaAs on the current of a metal-insulator-semiconductor structure', Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, vol. 14, no. 3, pp. 1745-1751. https://doi.org/10.1116/1.588551

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author = "Chen, \{C. L.\} and Mahoney, \{L. J.\} and Nichols, \{K. B.\} and Manfra, \{M. J.\} and Brown, \{E. R.\} and Nitishin, \{P. M.\} and Molvar, \{K. M.\} and Gramstorff, \{B. F.\} and Murphy, \{R. A.\}",

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AU - Chen, C. L.

AU - Mahoney, L. J.

AU - Nichols, K. B.

AU - Manfra, M. J.

AU - Brown, E. R.

AU - Nitishin, P. M.

AU - Molvar, K. M.

AU - Gramstorff, B. F.

AU - Murphy, R. A.

PY - 1996

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JO - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

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IS - 3

ER -

Effects of low-temperature-grown GaAs and AlGaAs on the current of a metal-insulator-semiconductor structure

ASJC Scopus Subject Areas

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