Effects of low-temperature-grown GaAs and AlGaAs on the current of a metal-insulator-semiconductor structure

C. L. Chen; L. J. Mahoney; K. B. Nichols; M. J. Manfra; E. R. Brown; P. M. Nitishin; K. M. Molvar; B. F. Gramstorff; R. A. Murphy

doi:10.1116/1.588551

Effects of low-temperature-grown GaAs and AlGaAs on the current of a metal-insulator-semiconductor structure

C. L. Chen
, L. J. Mahoney
, K. B. Nichols
, M. J. Manfra
, E. R. Brown
, P. M. Nitishin
, K. M. Molvar
, B. F. Gramstorff
, R. A. Murphy

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	1745-1751
Number of pages	7
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	14
Issue number	3
DOIs	https://doi.org/10.1116/1.588551
State	Published - 1996
Externally published	Yes

ASJC Scopus Subject Areas

Condensed Matter Physics
Electrical and Electronic Engineering

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10.1116/1.588551

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Chen, C. L., Mahoney, L. J., Nichols, K. B., Manfra, M. J., Brown, E. R., Nitishin, P. M., Molvar, K. M., Gramstorff, B. F., & Murphy, R. A. (1996). Effects of low-temperature-grown GaAs and AlGaAs on the current of a metal-insulator-semiconductor structure. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, 14(3), 1745-1751. https://doi.org/10.1116/1.588551

Chen, CL, Mahoney, LJ, Nichols, KB, Manfra, MJ, Brown, ER, Nitishin, PM, Molvar, KM, Gramstorff, BF & Murphy, RA 1996, 'Effects of low-temperature-grown GaAs and AlGaAs on the current of a metal-insulator-semiconductor structure', Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, vol. 14, no. 3, pp. 1745-1751. https://doi.org/10.1116/1.588551

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title = "Effects of low-temperature-grown GaAs and AlGaAs on the current of a metal-insulator-semiconductor structure",

author = "Chen, \{C. L.\} and Mahoney, \{L. J.\} and Nichols, \{K. B.\} and Manfra, \{M. J.\} and Brown, \{E. R.\} and Nitishin, \{P. M.\} and Molvar, \{K. M.\} and Gramstorff, \{B. F.\} and Murphy, \{R. A.\}",

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T1 - Effects of low-temperature-grown GaAs and AlGaAs on the current of a metal-insulator-semiconductor structure

AU - Chen, C. L.

AU - Mahoney, L. J.

AU - Nichols, K. B.

AU - Manfra, M. J.

AU - Brown, E. R.

AU - Nitishin, P. M.

AU - Molvar, K. M.

AU - Gramstorff, B. F.

AU - Murphy, R. A.

PY - 1996

Y1 - 1996

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SN - 1071-1023

VL - 14

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JO - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

JF - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

IS - 3

ER -

Effects of low-temperature-grown GaAs and AlGaAs on the current of a metal-insulator-semiconductor structure

ASJC Scopus Subject Areas

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