@article{72c6e91f9da449caa3de8d448b491855,
title = "Effects of Substrate and Post-Growth Treatments on the Microstructure and Properties of ZnO Thin Films Prepared by Atomic Layer Deposition",
keywords = "Atomic layer deposition, defects in semiconductors, optical band gap, positron annihilation spectroscopy, transparent conductors, ZnO",
author = "Micah Haseman and P. Saadatkia and Winarski, \{D. J.\} and Selim, \{F. A.\} and Leedy, \{K. D.\} and S. Tetlak and Look, \{D. C.\} and W. Anwand and A. Wagner",
note = "Publisher Copyright: {\textcopyright} 2016, The Minerals, Metals \& Materials Society.",
year = "2016",
month = dec,
day = "1",
doi = "10.1007/s11664-016-5025-0",
language = "English",
volume = "45",
pages = "6337--6345",
journal = "Journal of Electronic Materials",
issn = "0361-5235",
number = "12",
}