Fabrication of ZnO-based metal-insulator-semiconductor diodes by ion implantation

Ya I. Alivov, D. C. Look, B. M. Ataev, M. V. Chukichev, V. V. Mamedov, V. I. Zinenko, Yu A. Agafonov, A. N. Pustovit

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)2343-2346
Number of pages4
JournalSolid-State Electronics
Volume48
Issue number12
DOIs
StatePublished - Dec 2004

ASJC Scopus Subject Areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry

Keywords

  • Electroluminescence
  • Implantation
  • Metal-insulator-semiconductor diodes
  • Zinc oxide

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