@article{f321d79df4874d34b5bed0d7b77eb359,
title = "Fabrication of ZnO-based metal-insulator-semiconductor diodes by ion implantation",
keywords = "Electroluminescence, Implantation, Metal-insulator-semiconductor diodes, Zinc oxide",
author = "Alivov, {Ya I.} and Look, {D. C.} and Ataev, {B. M.} and Chukichev, {M. V.} and Mamedov, {V. V.} and Zinenko, {V. I.} and Agafonov, {Yu A.} and Pustovit, {A. N.}",
year = "2004",
month = dec,
doi = "10.1016/j.sse.2004.05.063",
language = "English",
volume = "48",
pages = "2343--2346",
journal = "Solid-State Electronics",
issn = "0038-1101",
number = "12",
}