Fabrication of ZnO-based metal-insulator-semiconductor diodes by ion implantation

Ya I. Alivov; D. C. Look; B. M. Ataev; M. V. Chukichev; V. V. Mamedov; V. I. Zinenko; Yu A. Agafonov; A. N. Pustovit

doi:10.1016/j.sse.2004.05.063

Fabrication of ZnO-based metal-insulator-semiconductor diodes by ion implantation

Ya I. Alivov, D. C. Look, B. M. Ataev, M. V. Chukichev, V. V. Mamedov, V. I. Zinenko, Yu A. Agafonov, A. N. Pustovit

Future of Semiconductors, a National Science Foundation Program

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	2343-2346
Number of pages	4
Journal	Solid-State Electronics
Volume	48
Issue number	12
DOIs	https://doi.org/10.1016/j.sse.2004.05.063
State	Published - Dec 2004

ASJC Scopus Subject Areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Electrical and Electronic Engineering
Materials Chemistry

Keywords

Electroluminescence
Implantation
Metal-insulator-semiconductor diodes
Zinc oxide

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10.1016/j.sse.2004.05.063

Cite this

@article{f321d79df4874d34b5bed0d7b77eb359,

title = "Fabrication of ZnO-based metal-insulator-semiconductor diodes by ion implantation",

keywords = "Electroluminescence, Implantation, Metal-insulator-semiconductor diodes, Zinc oxide",

author = "Alivov, \{Ya I.\} and Look, \{D. C.\} and Ataev, \{B. M.\} and Chukichev, \{M. V.\} and Mamedov, \{V. V.\} and Zinenko, \{V. I.\} and Agafonov, \{Yu A.\} and Pustovit, \{A. N.\}",

year = "2004",

month = dec,

doi = "10.1016/j.sse.2004.05.063",

language = "English",

volume = "48",

pages = "2343--2346",

journal = "Solid-State Electronics",

issn = "0038-1101",

number = "12",

}

TY - JOUR

T1 - Fabrication of ZnO-based metal-insulator-semiconductor diodes by ion implantation

AU - Alivov, Ya I.

AU - Look, D. C.

AU - Ataev, B. M.

AU - Chukichev, M. V.

AU - Mamedov, V. V.

AU - Zinenko, V. I.

AU - Agafonov, Yu A.

AU - Pustovit, A. N.

PY - 2004/12

Y1 - 2004/12

KW - Electroluminescence

KW - Implantation

KW - Metal-insulator-semiconductor diodes

KW - Zinc oxide

UR - https://www.scopus.com/pages/publications/4544341344

UR - https://www.scopus.com/inward/citedby.url?scp=4544341344&partnerID=8YFLogxK

U2 - 10.1016/j.sse.2004.05.063

DO - 10.1016/j.sse.2004.05.063

M3 - Article

AN - SCOPUS:4544341344

SN - 0038-1101

VL - 48

SP - 2343

EP - 2346

JO - Solid-State Electronics

JF - Solid-State Electronics

IS - 12

ER -

Fabrication of ZnO-based metal-insulator-semiconductor diodes by ion implantation

ASJC Scopus Subject Areas

Keywords

Access to Document

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