Original language | English |
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Article number | 022201 |
Journal | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
Volume | 41 |
Issue number | 2 |
DOIs | |
State | Published - Mar 1 2023 |
Externally published | Yes |
ASJC Scopus Subject Areas
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films