@article{26ab068bc2df4f059ac1f13b8de25f05,
title = "Femtosecond versus nanosecond laser machining: Comparison of induced stresses and structural changes in silicon wafers",
keywords = "Femtosecond laser machining, Induced stress, Laser machining, Micromachining, Raman spectroscopy, Silicon amorphization",
author = "Amer, \{M. S.\} and El-Ashry, \{M. A.\} and Dosser, \{L. R.\} and Hix, \{K. E.\} and Maguire, \{J. F.\} and Bryan Irwin",
year = "2005",
month = mar,
day = "31",
doi = "10.1016/j.apsusc.2004.08.029",
language = "English",
volume = "242",
pages = "162--167",
journal = "Applied Surface Science",
issn = "0169-4332",
number = "1-2",
}