Abstract
Microstrip transmission lines fabricated on standard silicon wafers are shown to benefit from the incorporation of thin ferromagnetic Ni-Fe films when compared to control devices without Ni-Fe. At 1 GHz, inductance and quality factor of the microstrip lines are enhanced by factors of 6 and 3, respectively, while the characteristic impedance of a 20 μm wide line is increased by 85%. For constant characteristic impedance, a 200 nm thick Ni-Fe film reduces attenuation from 1.6 to 0.7 dB/cm at 500 MHz.
Original language | English |
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Pages (from-to) | 2630-2632 |
Number of pages | 3 |
Journal | IEEE Transactions on Magnetics |
Volume | 43 |
Issue number | 6 |
DOIs | |
State | Published - Jun 2007 |
Externally published | Yes |
ASJC Scopus Subject Areas
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering
Keywords
- Integrated circuit interconnections
- Magnetic microwave devices
- Microstrip
- Planar transmission lines
Disciplines
- Electrical and Computer Engineering