Four-terminal square piezoresistive sensors for MEMS pressure sensing

Awlad Hossain; Ahsan Mian

doi:10.1155/2017/6954875

Four-terminal square piezoresistive sensors for MEMS pressure sensing

Awlad Hossain, Ahsan Mian

Wright State University

Research output: Contribution to journal › Article › peer-review

Original language	English
Article number	6954875
Journal	Journal of Sensors
Volume	2017
DOIs	https://doi.org/10.1155/2017/6954875
State	Published - Jan 1 2017

ASJC Scopus Subject Areas

Control and Systems Engineering
Instrumentation
Electrical and Electronic Engineering

Disciplines

Engineering
Materials Science and Engineering
Mechanical Engineering

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10.1155/2017/6954875

Four-Terminal Square Piezoresistive Sensors for MEMS Pressure SenFinal published version, 3.84 MBLicense: Unspecified

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title = "Four-terminal square piezoresistive sensors for MEMS pressure sensing",

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language = "English",

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JF - Journal of Sensors

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Four-terminal square piezoresistive sensors for MEMS pressure sensing

ASJC Scopus Subject Areas

Disciplines

Access to Document

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