GaAs MMIC wafer level mapping for material and process diagnostics

H. Kanber; D. C. Wang; E. T. Pan; D. C. Look

GaAs MMIC wafer level mapping for material and process diagnostics

H. Kanber, D. C. Wang, E. T. Pan, D. C. Look

Future of Semiconductors, a National Science Foundation Program

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	Technical Digest - GaAs IC Symposium (Gallium Arsenide Integrated Circuit)
Publisher	Publ by IEEE
Pages	285-288
Number of pages	4
ISBN (Print)	078030196X
State	Published - Jan 1992
Event	13th Annual GaAs IC Symposium Technical Digest - Monterey, CA, USA Duration: Oct 20 1991 → Oct 23 1991

Publication series

Name	Technical Digest - GaAs IC Symposium (Gallium Arsenide Integrated Circuit)

Conference

Conference	13th Annual GaAs IC Symposium Technical Digest
City	Monterey, CA, USA
Period	10/20/91 → 10/23/91

ASJC Scopus Subject Areas

Electrical and Electronic Engineering

Cite this

GaAs MMIC wafer level mapping for material and process diagnostics. / Kanber, H.; Wang, D. C.; Pan, E. T. et al.
Technical Digest - GaAs IC Symposium (Gallium Arsenide Integrated Circuit). Publ by IEEE, 1992. p. 285-288 (Technical Digest - GaAs IC Symposium (Gallium Arsenide Integrated Circuit)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Kanber, H, Wang, DC, Pan, ET & Look, DC 1992, GaAs MMIC wafer level mapping for material and process diagnostics. in Technical Digest - GaAs IC Symposium (Gallium Arsenide Integrated Circuit). Technical Digest - GaAs IC Symposium (Gallium Arsenide Integrated Circuit), Publ by IEEE, pp. 285-288, 13th Annual GaAs IC Symposium Technical Digest, Monterey, CA, USA, 10/20/91.

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title = "GaAs MMIC wafer level mapping for material and process diagnostics",

author = "H. Kanber and Wang, {D. C.} and Pan, {E. T.} and Look, {D. C.}",

year = "1992",

month = jan,

language = "English",

isbn = "078030196X",

series = "Technical Digest - GaAs IC Symposium (Gallium Arsenide Integrated Circuit)",

publisher = "Publ by IEEE",

pages = "285--288",

booktitle = "Technical Digest - GaAs IC Symposium (Gallium Arsenide Integrated Circuit)",

note = "13th Annual GaAs IC Symposium Technical Digest ; Conference date: 20-10-1991 Through 23-10-1991",

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T1 - GaAs MMIC wafer level mapping for material and process diagnostics

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AU - Pan, E. T.

AU - Look, D. C.

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M3 - Conference contribution

AN - SCOPUS:0026678423

SN - 078030196X

T3 - Technical Digest - GaAs IC Symposium (Gallium Arsenide Integrated Circuit)

SP - 285

EP - 288

BT - Technical Digest - GaAs IC Symposium (Gallium Arsenide Integrated Circuit)

PB - Publ by IEEE

T2 - 13th Annual GaAs IC Symposium Technical Digest

Y2 - 20 October 1991 through 23 October 1991

ER -

GaAs MMIC wafer level mapping for material and process diagnostics

Publication series

Conference

ASJC Scopus Subject Areas

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Cite this