Geometric optimization of Van Der Pauw structure based MEMS pressure sensor

Jesse Law, Robert Cassei, Ahsan Mian

Research output: Contribution to conference › Paper › peer-review

Original language	English
Pages	509-512
Number of pages	4
DOIs	https://doi.org/10.1115/IMECE2007-42307
State	Published - 2008
Event	ASME International Mechanical Engineering Congress and Exposition, IMECE 2007 - Seattle, WA, United States Duration: Nov 11 2007 → Nov 15 2007

Conference	ASME International Mechanical Engineering Congress and Exposition, IMECE 2007
Country/Territory	United States
City	Seattle, WA
Period	11/11/07 → 11/15/07

ASJC Scopus Subject Areas

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