| Original language | English |
|---|---|
| Pages (from-to) | 1921-1929 |
| Number of pages | 9 |
| Journal | Microsystem Technologies |
| Volume | 16 |
| Issue number | 11 |
| DOIs | |
| State | Published - Nov 1 2010 |
ASJC Scopus Subject Areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Hardware and Architecture
- Electrical and Electronic Engineering
Keywords
- Angular Misalignment
- Diaphragm Pressure
- Displacement Solution
- Silicon Diaphragm
- Wheatstone Bridge
Disciplines
- Engineering
- Materials Science and Engineering
- Mechanical Engineering