Geometric optimization of Van Der Pauw structure based MEMS pressure sensor

Jesse Law; Robert Cassel; Ahsan Mian

doi:10.1115/IMECE200742307

Geometric optimization of Van Der Pauw structure based MEMS pressure sensor

Jesse Law, Robert Cassel, Ahsan Mian

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	Micro and Nano Systems
Publisher	American Society of Mechanical Engineers (ASME)
Pages	509-512
Number of pages	4
ISBN (Electronic)	079184305X
DOIs	https://doi.org/10.1115/IMECE200742307
State	Published - 2007
Externally published	Yes
Event	ASME 2007 International Mechanical Engineering Congress and Exposition, IMECE 2007 - Seattle, United States Duration: Nov 11 2007 → Nov 15 2007

Publication series

Name	ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)
Volume	11

Conference

Conference	ASME 2007 International Mechanical Engineering Congress and Exposition, IMECE 2007
Country/Territory	United States
City	Seattle
Period	11/11/07 → 11/15/07

ASJC Scopus Subject Areas

Mechanical Engineering

Access to Document

10.1115/IMECE200742307

Cite this

Geometric optimization of Van Der Pauw structure based MEMS pressure sensor. / Law, Jesse; Cassel, Robert; Mian, Ahsan.
Micro and Nano Systems. American Society of Mechanical Engineers (ASME), 2007. p. 509-512 (ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE); Vol. 11).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Law, J, Cassel, R & Mian, A 2007, Geometric optimization of Van Der Pauw structure based MEMS pressure sensor. in Micro and Nano Systems. ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE), vol. 11, American Society of Mechanical Engineers (ASME), pp. 509-512, ASME 2007 International Mechanical Engineering Congress and Exposition, IMECE 2007, Seattle, United States, 11/11/07. https://doi.org/10.1115/IMECE200742307

@inproceedings{9d27242d1d734f32adb42c12ff2843f4,

title = "Geometric optimization of Van Der Pauw structure based MEMS pressure sensor",

author = "Jesse Law and Robert Cassel and Ahsan Mian",

note = "Publisher Copyright: Copyright {\textcopyright} 2007 by ASME.; ASME 2007 International Mechanical Engineering Congress and Exposition, IMECE 2007 ; Conference date: 11-11-2007 Through 15-11-2007",

year = "2007",

doi = "10.1115/IMECE200742307",

language = "English",

series = "ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)",

publisher = "American Society of Mechanical Engineers (ASME)",

pages = "509--512",

booktitle = "Micro and Nano Systems",

}

TY - GEN

T1 - Geometric optimization of Van Der Pauw structure based MEMS pressure sensor

AU - Law, Jesse

AU - Cassel, Robert

AU - Mian, Ahsan

PY - 2007

Y1 - 2007

UR - http://www.scopus.com/inward/record.url?scp=84928593546&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84928593546&partnerID=8YFLogxK

U2 - 10.1115/IMECE200742307

DO - 10.1115/IMECE200742307

M3 - Conference contribution

AN - SCOPUS:84928593546

T3 - ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)

SP - 509

EP - 512

BT - Micro and Nano Systems

PB - American Society of Mechanical Engineers (ASME)

T2 - ASME 2007 International Mechanical Engineering Congress and Exposition, IMECE 2007

Y2 - 11 November 2007 through 15 November 2007

ER -

Geometric optimization of Van Der Pauw structure based MEMS pressure sensor

Publication series

Conference

ASJC Scopus Subject Areas

Access to Document

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Cite this