Abstract
We demonstrate high-quality integrated inductors built from a multilayer of alternating copper and ferromagnetic films. The multilayer acts as a meta-conductor whose effective permeability becomes nearly zero at its ferromagnetic anti-resonance frequency. This leads to a suppression of the skin effect and a significant increase in the quality factor of the device. Experiments show an up to 86% increase in quality factor compared to conventional copper-based spiral inductors at high frequencies.
Original language | English |
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Article number | 6218130 |
Pages (from-to) | 345-347 |
Number of pages | 3 |
Journal | IEEE Microwave and Wireless Components Letters |
Volume | 22 |
Issue number | 7 |
DOIs | |
State | Published - Jun 21 2012 |
ASJC Scopus Subject Areas
- Condensed Matter Physics
- Electrical and Electronic Engineering
Keywords
- Ferromagnetic resonance (FMR)
- inductor
- magnetic thin film
- quality factor
- radio frequency (RF)
- Ferromagnetic resonance (FMR), inductor, magnetic thin film, quality factor, radio frequency (RF)
Disciplines
- Electrical and Computer Engineering