Abstract
We demonstrate high-quality integrated inductors built from a multilayer of alternating copper and ferromagnetic films. The multilayer acts as a meta-conductor whose effective permeability becomes nearly zero at its ferromagnetic anti-resonance frequency. This leads to a suppression of the skin effect and a significant increase in the quality factor of the device. Experiments show an up to 86% increase in quality factor compared to conventional copper-based spiral inductors at high frequencies.
| Original language | English |
|---|---|
| Article number | 6218130 |
| Pages (from-to) | 345-347 |
| Number of pages | 3 |
| Journal | IEEE Microwave and Wireless Components Letters |
| Volume | 22 |
| Issue number | 7 |
| DOIs | |
| State | Published - 2012 |
ASJC Scopus Subject Areas
- Condensed Matter Physics
- Electrical and Electronic Engineering
Keywords
- Ferromagnetic resonance (FMR)
- inductor
- magnetic thin film
- quality factor
- radio frequency (RF)
- Ferromagnetic resonance (FMR), inductor, magnetic thin film, quality factor, radio frequency (RF)
Disciplines
- Electrical and Computer Engineering