| Original language | English |
|---|---|
| Pages (from-to) | 1703-1706 |
| Number of pages | 4 |
| Journal | Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures |
| Volume | 15 |
| Issue number | 5 |
| DOIs | |
| State | Published - 1997 |
ASJC Scopus Subject Areas
- Condensed Matter Physics
- Electrical and Electronic Engineering