@article{dce7b56998f14e2f8cef72cadd945273,
title = "High Sensitivity Pressure Measurement using van der Pauw Structure as a Sensing Element",
keywords = "Pressure measurement, Sensors, Pressure, Resistors, Silicon, Equations, Diaphragms (Structural), Pressure sensors, Microelectromechanical systems, Calibration",
author = "Robert Cassel and Mishty, {Anamika S.} and Ahsan Mian",
year = "2009",
month = nov,
day = "13",
doi = "10.1115/IMECE2009-11649",
language = "American English",
volume = "12 - Micro and Nano Systems, Parts A and B",
journal = "ASME 2009 International Mechanical Engineering Congress and Exposition",
}