In-implanted ZnO: Controlled degenerate surface layer

D. C. Look; G. C. Farlow; F. Yaqoob; L. H. Vanamurthy; M. Huang

doi:10.1116/1.3089375

In-implanted ZnO: Controlled degenerate surface layer

D. C. Look, G. C. Farlow, F. Yaqoob, L. H. Vanamurthy, M. Huang

Future of Semiconductors, a National Science Foundation Program

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	1593-1596
Number of pages	4
Journal	Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics
Volume	27
Issue number	3
DOIs	https://doi.org/10.1116/1.3089375
State	Published - 2009

ASJC Scopus Subject Areas

Electronic, Optical and Magnetic Materials
Instrumentation
Process Chemistry and Technology
Surfaces, Coatings and Films
Electrical and Electronic Engineering
Materials Chemistry

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10.1116/1.3089375

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title = "In-implanted ZnO: Controlled degenerate surface layer",

author = "Look, {D. C.} and Farlow, {G. C.} and F. Yaqoob and Vanamurthy, {L. H.} and M. Huang",

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AU - Vanamurthy, L. H.

AU - Huang, M.

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In-implanted ZnO: Controlled degenerate surface layer

ASJC Scopus Subject Areas

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