In-implanted ZnO: Controlled degenerate surface layer

D. C. Look; G. C. Farlow; F. Yaqoob; L. H. Vanamurthy; M. Huang

doi:10.1116/1.3089375

In-implanted ZnO: Controlled degenerate surface layer

D. C. Look
, G. C. Farlow
, F. Yaqoob
, L. H. Vanamurthy
, M. Huang

Future of Semiconductors, a National Science Foundation Program

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	1593-1596
Number of pages	4
Journal	Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics
Volume	27
Issue number	3
DOIs	https://doi.org/10.1116/1.3089375
State	Published - 2009

ASJC Scopus Subject Areas

Electronic, Optical and Magnetic Materials
Instrumentation
Process Chemistry and Technology
Surfaces, Coatings and Films
Electrical and Electronic Engineering
Materials Chemistry

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10.1116/1.3089375

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@article{9f44b706691941c3b4b7d48137e84bfb,

title = "In-implanted ZnO: Controlled degenerate surface layer",

author = "Look, \{D. C.\} and Farlow, \{G. C.\} and F. Yaqoob and Vanamurthy, \{L. H.\} and M. Huang",

year = "2009",

doi = "10.1116/1.3089375",

language = "English",

volume = "27",

pages = "1593--1596",

journal = "Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics",

issn = "2166-2746",

number = "3",

}

TY - JOUR

T1 - In-implanted ZnO

T2 - Controlled degenerate surface layer

AU - Look, D. C.

AU - Farlow, G. C.

AU - Yaqoob, F.

AU - Vanamurthy, L. H.

AU - Huang, M.

PY - 2009

Y1 - 2009

UR - https://www.scopus.com/pages/publications/79953839386

UR - https://www.scopus.com/pages/publications/79953839386#tab=citedBy

U2 - 10.1116/1.3089375

DO - 10.1116/1.3089375

M3 - Article

AN - SCOPUS:79953839386

SN - 2166-2746

VL - 27

SP - 1593

EP - 1596

JO - Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics

JF - Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics

IS - 3

ER -

In-implanted ZnO: Controlled degenerate surface layer

ASJC Scopus Subject Areas

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