In-plane X-ray scattering of epitaxial structures

S. F. Cui, Y. T. Wang, Yan Zhuang, M. Li, Z. H. Mai

Research output: Contribution to journalLetterpeer-review

Abstract

A new approach for in-plane X-ray scattering from the cleavages of epitaxial films or superlattices, where the scattering vectors are parallel to the interfaces, is proposed. This method can be employed to determine directly the in-plane X-ray strains and other atomic registry along the interfaces of the epitaxial structures.
Original languageAmerican English
Pages (from-to)354-358
JournalJournal of Crystal Growth
Volume152
Issue number4
DOIs
StatePublished - Jul 2 1995
Externally publishedYes

Keywords

  • X-ray diffraction

Disciplines

  • Electrical and Computer Engineering

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