@article{8b03cc095675456dac2ae572c12881d3,
title = "Induced stresses and structural changes in silicon wafers as a result of laser micro-machining",
keywords = "Induced stress, Laser machining, Micro-machining, Raman spectroscopy, Silicon amorphization",
author = "Amer, {Maher S.} and Larry Dosser and Steven LeClair and Maguire, {John F.}",
year = "2002",
month = feb,
day = "28",
doi = "10.1016/S0169-4332(01)01043-1",
language = "English",
volume = "187",
pages = "291--296",
journal = "Applied Surface Science",
issn = "0169-4332",
number = "3-4",
}