Abstract
Integrated radio-frequency solenoids with micro-patterned magnetic cores for reduced dimensions and compatibility with CMOS/BiCMOS process technology are presented and discussed. It is demonstrated that the use of a ferromagnetic (FM) core leads to a more than 20-fold enhanced inductance per area. This is achieved by tailoring the anisotropy of the FM core and the design of the metal coil structure. Both a higher operating frequency and a larger inductance are obtained by increasing the shape aspect ratio of the FM core and by depositing the magnetic film under an external magnetic field. A reference to an optimum shape anisotropy has been created by measuring the FM core inductors with an external DC magnetic field. An optimum practical trade-off of inductance and operating frequency results from patterning of the FM core.
Original language | English |
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Pages (from-to) | 405-413 |
Number of pages | 9 |
Journal | Solid-State Electronics |
Volume | 51 |
Issue number | 3 |
DOIs | |
State | Published - Mar 2007 |
Externally published | Yes |
ASJC Scopus Subject Areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Electrical and Electronic Engineering
- Materials Chemistry
Keywords
- Ferromagnetic
- Inductor
- RF-IC
Disciplines
- Electrical and Computer Engineering