Integrated RF inductors with micro-patterned NiFe core

Y. Zhuang, M. Vroubel, B. Rejaei, J. N. Burghartz

Research output: Contribution to journalArticlepeer-review

Abstract

Integrated radio-frequency solenoids with micro-patterned magnetic cores for reduced dimensions and compatibility with CMOS/BiCMOS process technology are presented and discussed. It is demonstrated that the use of a ferromagnetic (FM) core leads to a more than 20-fold enhanced inductance per area. This is achieved by tailoring the anisotropy of the FM core and the design of the metal coil structure. Both a higher operating frequency and a larger inductance are obtained by increasing the shape aspect ratio of the FM core and by depositing the magnetic film under an external magnetic field. A reference to an optimum shape anisotropy has been created by measuring the FM core inductors with an external DC magnetic field. An optimum practical trade-off of inductance and operating frequency results from patterning of the FM core.
Original languageEnglish
Pages (from-to)405-413
Number of pages9
JournalSolid-State Electronics
Volume51
Issue number3
DOIs
StatePublished - Mar 2007
Externally publishedYes

ASJC Scopus Subject Areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry

Keywords

  • Ferromagnetic
  • Inductor
  • RF-IC

Disciplines

  • Electrical and Computer Engineering

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