Integrated solenoid inductors with patterned, sputter-deposited Cr/Fe10Co90/Cr ferromagnetic cores

Yan Zhuang; B. Rejaei; E. Boellaard; M. Vroubel; J. N. Burghartz

doi:10.1109/LED.2003.810880

Integrated solenoid inductors with patterned, sputter-deposited Cr/Fe₁₀Co₉₀/Cr ferromagnetic cores

Yan Zhuang, B. Rejaei, E. Boellaard, M. Vroubel, J. N. Burghartz

Research output: Contribution to journal › Letter › peer-review

Original language	English
Pages (from-to)	224-226
Number of pages	3
Journal	IEEE Electron Device Letters
Volume	24
Issue number	4
DOIs	https://doi.org/10.1109/LED.2003.810880
State	Published - Apr 2003
Externally published	Yes

ASJC Scopus Subject Areas

Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering

Keywords

Inductor
Micropatterning
On-chip
Radio frequency
Shadow mask

Access to Document

10.1109/LED.2003.810880

Cite this

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title = "Integrated solenoid inductors with patterned, sputter-deposited Cr/Fe10Co90/Cr ferromagnetic cores",

keywords = "Inductor, Micropatterning, On-chip, Radio frequency, Shadow mask",

author = "Yan Zhuang and B. Rejaei and E. Boellaard and M. Vroubel and Burghartz, {J. N.}",

year = "2003",

month = apr,

doi = "10.1109/LED.2003.810880",

language = "English",

volume = "24",

pages = "224--226",

journal = "IEEE Electron Device Letters",

issn = "0741-3106",

number = "4",

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TY - JOUR

T1 - Integrated solenoid inductors with patterned, sputter-deposited Cr/Fe10Co90/Cr ferromagnetic cores

AU - Zhuang, Yan

AU - Rejaei, B.

AU - Boellaard, E.

AU - Vroubel, M.

AU - Burghartz, J. N.

PY - 2003/4

Y1 - 2003/4

KW - Inductor

KW - Micropatterning

KW - On-chip

KW - Radio frequency

KW - Shadow mask

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U2 - 10.1109/LED.2003.810880

DO - 10.1109/LED.2003.810880

M3 - Letter

AN - SCOPUS:0038104354

SN - 0741-3106

VL - 24

SP - 224

EP - 226

JO - IEEE Electron Device Letters

JF - IEEE Electron Device Letters

IS - 4

ER -