Investigation of the interface properties of MOVPE grown AlGaN/GaN high electron mobility transistor (HEMT) structures on sapphire

T. Aggerstam, S. Lourdudoss, H. H. Radamson, M. Sjödin, P. Lorenzini, D. C. Look

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)705-707
Number of pages3
JournalThin Solid Films
Volume515
Issue number2 SPEC. ISS.
DOIs
StatePublished - Oct 25 2006

ASJC Scopus Subject Areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

Keywords

  • Dislocations
  • HEMT
  • Interface roughness
  • MOVPE
  • Scattering
  • X-Ray reflectivity

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