@inproceedings{5e7d0df4f5334347b3f4e098be76de7b,
title = "Joining challenges in the packaging of BIOMEMS",
author = "Herfurth, {H. J.} and R. Witte and S. Heinemann and G. Newaz and A. Mian and D. Georgiev and G. Auner",
year = "2004",
doi = "10.2351/1.5060338",
language = "English",
isbn = "0912035773",
series = "ICALEO 2004 - 23rd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings",
publisher = "Laser Institute of America",
booktitle = "ICALEO 2004 - 23rd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings",
note = "ICALEO 2004 - 23rd International Congress on Applications of Laser and Electro-Optics ; Conference date: 04-10-2004 Through 07-10-2004",
}