LEED Study of the Growth of Aluminum Films on the Ta(110) Surface

A. G. Jackson, M. P. Hooker, T. W. Haas

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Abstract

Growth of aluminumfilms on clean Ta(110) surfaces has been investigated by LEED techniques. Five phases of aluminum have been found, which are: (1) disordered Al(111), formed by depositing at T <600°C; (2) Al(111) c (2×2) formed by heating film, deposited at T <300°C, to 700°C; (3) Al(100) c (2×2), formed by heating film, deposited 300< T <600°C, to 700°C; (4) Epitaxial Al(111), formed by depositing film with substrate T in range 600< T <670°C; (5) Diffuse phase, formed by heating any of the preceding to 800°C. Two orientations of each structure have been observed; this results from the close match between primitive unit meshes of aluminum (111), (100) and Ta(110). A mechanism for the growth of Al(111) and Al(100) is suggested. Comparisons with some published LEED data on epitaxy are made.

Original languageAmerican English
JournalJournal of Applied Physics
Volume38
DOIs
StatePublished - Jan 1 1967

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